Analysis of Crack Propagation in Stealth Dicing Using Stress Intensity Factor(<Special Issue>M & M 2009 Conference)
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- OHMURA Etsuji
- Osaka University, Graduate School of Engineering
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- OGAWA Kensuke
- 大阪大学工学部
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- KUMAGAI Masayoshi
- 浜松ホトニクス(株)
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- NAKANO Makoto
- 浜松ホトニクス(株)
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- FUKUMITSU Kenshi
- 浜松ホトニクス(株)
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- MORITA Hideki
- 浜松ホトニクス(株)
Bibliographic Information
- Other Title
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- ステルスダイシングにおける応力拡大係数を用いたき裂進展解析(<小特集>M&M2009材料力学カンファレンス)
- ステルスダイシングにおける応力拡大係数を用いたき裂進展解析
- ステルスダイシング ニ オケル オウリョク カクダイ ケイスウ オ モチイタ キレツ シンテン カイセキ
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Abstract
In stealth dicing (SD), a permeable nanosecond laser is focused inside a silicon wafer and scanned horizontally. A thermal shock wave is propagated every pulse toward the side to which the laser is irradiated, then a high dislocation density layer is formed inside a wafer after the thermal shock wave propagation. In our previous study, it was supposed that an internal crack whose initiation is a dislocation is propagated when the thermal shock wave by the next pulse over-laps with this layer partially. In this study, a two-dimensional thermal elasticity analysis based on the fracture mechanics was conducted. The internal crack propagation was analyzed by calculating the stress intensity factor at the crack tips and comparing with a threshold of that. As a result, validity of the previous hypothesis was suggested.
Journal
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- TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A
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TRANSACTIONS OF THE JAPAN SOCIETY OF MECHANICAL ENGINEERS Series A 76 (764), 446-448, 2010
The Japan Society of Mechanical Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390282679455112704
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- NII Article ID
- 110007593687
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- NII Book ID
- AN0018742X
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- ISSN
- 18848338
- 03875008
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- NDL BIB ID
- 10684768
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed