半導体製造におけるプロセス管理

川村 大伸

doi:10.20684/quality.44.3_276

書誌事項

タイトル別名

Process Control for Semiconductor Manufacturing
ハンドウタイセイゾウニオケルプロセスカンリ

公開日: 2014

資源種別: journal article

DOI

10.20684/quality.44.3_276

公開者: 一般社団法人日本品質管理学会

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説明

Although the word of big data is very popular in Japan nowadays, it is not introduced many examples about manufacturing processes relevant to big data. This paper reports several examples of big data on process control for semiconductor manufacturing. Specifically, the number of the measurement point on a wafer, the sensors of semiconductor equipments, QWACS (Quality early Warning Alarm Control System) for real-time statistical process control are introduced, comparing the past with the present. Moreover, QWACS has been developed by NEC Corporation. Furthermore, the examples are discussed from the viewpoints of volume, variety, velocity and veracity which the feature of big data has.

収録刊行物

品質

品質 44 (3), 276-279, 2014

一般社団法人日本品質管理学会

詳細情報詳細情報について

CRID: 1390282679478276608

NII論文ID: 110009833197

NII書誌ID: AN00354769

DOI: 10.20684/quality.44.3_276

ISSN: 24321044; 03868230

NDL書誌ID: 025698449

Web Site: http://id.ndl.go.jp/bib/025698449; https://ndlsearch.ndl.go.jp/books/R000000004-I025698449

本文言語コード: ja

資料種別: journal article

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