微粒子沈着現象の数値解析　ウエハー表面への沈着速度の計算

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書誌事項

タイトル別名
  • Calculation of the Deposition Velocity of a Particle onto a Wafer.
  • ビリュウシ チンチャク ゲンショウ ノ スウチ カイセキ ウエハー ヒョウメン
  • ウエハー表面への沈着速度の計算

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The trajectories of fine particles suspended in air (aerosol) are numerically calculated by use of the Langevin equation while considering the Brownian motion. The computation is carried out for particles (Dp=0.0510μm) in air flow around a wafer (Re=50). The electrostatic effect caused by Coulombic force between a wafer and a particle is also discussed.<BR>Based on the calculated results for the flow field and the electric field around the wafer, the calculated deposition velocity is in fairly good agreement with previous empirical and experimental results.

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