CMOS Image Sensor for Charge Particle Detection

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Bibliographic Information

Other Title
  • 荷電粒子検出用CMOSイメージセンサ
  • カデン リュウシ ケンシュツヨウ CMOS イメージ センサ

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Description

A stacked CMOS active pixel image sensor has been developed for detecting charge particles. Wide dynamic range of 80 dB and good linearity have been demonstrated with a charge particle imaging system which incorporates a secondary ion mass spectrometer(SIMS). noise measurement results suggest that dynamic range exceeding 100 dB can be obtained if the reset noise is suppressed by utilizing the nondestructive readout (NDRO) capability of the CMOS APS.

Journal

  • ITE Technical Report

    ITE Technical Report 23.60 (0), 7-12, 1999

    The Institute of Image Information and Television Engineers

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