High-Density Recording in Mass-Productive Polycrystalline Ferroelectric Thin Film Media

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  • 量産性を考慮した強誘電体高密度記録用多結晶薄膜記録媒体(固体メモリおよび一般)
  • 量産性を考慮した強誘電体高密度記録用多結晶薄膜記録媒体
  • リョウサンセイ オ コウリョ シタ キョウ ユウデンタイ コウミツド キロクヨウ タケッショウ ハクマク キロク バイタイ

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Abstract

We demonstrate very-high-density ferroelectric recording experiments of 1Tbit/in^2 in polycrystalline Pb (Zr, Ti)O_3 (PZT) thin film for the first time. A high-quality polycrystalline PZT thin film was successfully deposited on a silicon substrate with a SrRuO_3 (SRO) electrode by metal-organic chemical vapor deposition (MOCVD) technique. The roughness of the PZT film was reduced to less than 1nm by chemical mechanical polishing (CMP) method. The PZT film has a very high controllability for domain inversion. Our fabrication process also enables high productivity. Therefore, our PZT film has potential to be a mass-productive ferroelectric recording medium for high-density storage systems.

Journal

  • ITE Technical Report

    ITE Technical Report 33.41 (0), 25-29, 2009

    The Institute of Image Information and Television Engineers

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