3D SEM Measurement of Micro-Optical-Element Shape by Nanoparticle Scattering

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  • ナノ粒子散布による微細光学素子形状のSEM測定(発光型/非発光型ディスプレイ合同研究会)
  • ナノ粒子散布による微細光学素子形状のSEM測定
  • ナノ リュウシ サンプ ニ ヨル ビサイ コウガク ソシ ケイジョウ ノ SEM ソクテイ

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Abstract

Optical elements for display are required more complex control of the incident light, therefore measurements and evaluations of three-dimensional surface shape become more important. However conventional measurement methods of the surface shape can't measure samples with very flat surface or steep slope accurately. In this study, we try to measure three-dimensional shape with SEM more accurately by making fine pattern with scattering nanoparticles. As a result, we show the relation between the magnification of the nanoparticles and the accuracy of the measurement, and confirm the validity of the measurement.

Journal

  • ITE Technical Report

    ITE Technical Report 35.4 (0), 49-52, 2011

    The Institute of Image Information and Television Engineers

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