A CMOS-MEMS-Based Label-Free Protein Sensor Using Fabry-Perot Interferometer

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  • CMOS-MEMS技術を用いたファブリ・ペロー干渉計による非標識タンパク質センサ(固体撮像技術および一般～IEDM, SPIE EI, ISSCC特集～)
  • CMOS-MEMS技術を用いたファブリ・ペロー干渉計による非標識タンパク質センサ
  • CMOS-MEMS ギジュツ オ モチイタ ファブリ ・ ペロー カンショウケイ ニ ヨル ヒヒョウシキ タンパクシツ センサ

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Description

We have developed a CMOS-MEMS-based label-free protein sensor, which utilizes optical transmittance change by the Fabry-Perot interference to enhance the sensitivity of surface-stress. Theoretical minimum detectable surface stress of the proposed sensor is predicted -1 μN/m which is two orders of magnitude above the peizoresistive type. A read-out tiny photocurrent from the multidimensional arrayed MEMS sensor is signal-processed by integrated source follower circuit, selector, and decoder. We successfully demonstrated the MOSFET and MEMS sensor, and established the heterogeneous integration process. The integrated MEMS sensor array can be used for screening analysis for any cancers.

Journal

  • ITE Technical Report

    ITE Technical Report 37.19 (0), 5-8, 2013

    The Institute of Image Information and Television Engineers

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