Ultra-High Speed Capturing of Dielectric Breakdown of Metal-Oxide-silicon Capacitor up to 10M frame per second

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  • 最高撮像速度10Mfpsの高速度ビデオカメラによるMOSキャパシタの絶縁膜破壊現象の解析(高機能イメージセンシングとその応用)
  • ポスター講演 最高撮像速度10Mfpsの高速度ビデオカメラによるMOSキャパシタの絶縁膜破壊現象の解析
  • ポスター コウエン サイコウ サツゾウ ソクド 10Mfps ノ コウソクド ビデオカメラ ニ ヨル MOS キャパシタ ノ ゼツエンマク ハカイ ゲンショウ ノ カイセキ

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Abstract

In this paper, the ultra-high speed (UHS) video capturing results of time dependent dielectric breakdown (TDDB) of MOS capacitor are reported using the UHS camera with the maximum frame rate of 10M frame per second (fps). In order to capture the breakdown, we set a trigger circuit which detects the rapid current increase through the MOS capacitor, which supplies the trigger pulse to the UHS camera. Some movies have succeeded to capture the intermittent emissions of light on some points of the gate during the breakdown. From the movie taken at 1 Mfps, the order of the time interval of the emission of light was about 10 μsec and simultaneous emission of light at multiple points was not observed. From the movie taken at 10 Mfps, the time span of the emission of light was less than 1 μsec.

Journal

  • ITE Technical Report

    ITE Technical Report 38.20 (0), 13-16, 2014

    The Institute of Image Information and Television Engineers

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