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- MITSUYA Munehisa
- Advanced Research Laboratory, Hitachi, Ltd.
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- TANIGUCHI Yoshio
- Advanced Research Laboratory, Hitachi, Ltd.
Bibliographic Information
- Other Title
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- 真空蒸着法
- シンクウ ジョウチャクホウ
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Journal
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- Oyo Buturi
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Oyo Buturi 55 (9), 889-890, 1986
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390282679572101504
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- NII Article ID
- 130003591890
- 40000279293
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- NII Book ID
- AN00026679
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- ISSN
- 21882290
- 03698009
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- NDL BIB ID
- 3090661
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- Data Source
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- JaLC
- NDL Search
- CiNii Articles
