Improvement of Measurement Resolution of Depth Distribution in Cross-sectional Imaging using Terahertz Wave

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  • テラヘルツ波を用いた断層イメージングにおける深さ分布の測定精度向上
  • テラヘルツハ オ モチイタ ダンソウ イメージング ニ オケル フカサ ブンプ ノ ソクテイ セイド コウジョウ
  • Improvement of Measurement Resolution of Depth Distribution in Cross‐Sectional Imaging Using Terahertz Wave

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Time-resolved reflection measurement using broadband, short terahertz pulses can provide cross-sectional images of dielectric materials at different depths. Low frequency components which have responses over a wide time range may result in inclusion of spurious signals which arise from strong reflections at other depths. Model calculations showed that such spurious signals can be suppressed by application of a frequency filter of appropriate center frequency. The effect of frequency filtering was investigated in cross-sectional imaging of an IC card. Cross-sectional images were obtained at depth intervals of 0.18 mm, which provided images at 5 different depth intervals. As a result of frequency filtering, spurious images resulting from strong reflections at different depths could be reduced in intensity, which resulted in improvement of the measurement resolution of the depth distribution.

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