The Production of the Micro-lens by means of the YAG Laser Ion Exchange Method

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  • YAGレーザイオン交換法によるマイクロレンズの作成
  • YAG レーザ イオン コウカンホウ ニ ヨル マイクロ レンズ ノ サクセイ

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Abstract

The ion exchange method is widely used to produce micro-lenses. Types of the ion exchange method include the sedimentation by thermo ion exchange technique, the electrolytic importation method, and the CVD method. However, all of these methods require a process involving a photo mask, and require a long production time. Thus, the laser ion exchange method was developed in which the minimum region is irradiated using a Nd-YAG laser beam. When the laser beam irradiates the minimum region. The locally irradiated part is heated to a high temperature. This method is simultaneously optical damage and ion exchange in the irradiated area. It can prepare a minute lens of approximately about 200 μm. The difference of refractive index made 2.8×10-3 maximum. This paper describes the results of research regarding the production of planar micro-lenses by means of the laser ion exchange method a using Nd-YAG laser. The evaluation of the produced lens is also described.

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