Trace Elemental Analysis Technologies using Atmospheric Plasma Sources

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  • Shigeta Kaori
    Department of Energy Sciences, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
  • Nagata Yoichi
    Department of Energy Sciences, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
  • Iwai Takahiro
    Department of Earth & Planetary Sciences, Tokyo Institute of Technology
  • Miyahara Hidekazu
    Department of Energy Sciences, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
  • Okino Akitoshi
    Department of Energy Sciences, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology

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Other Title
  • 大気圧プラズマを用いた微量元素分析技術
  • タイキアツ プラズマ オ モチイタ ビリョウ ゲンソ ブンセキ ギジュツ

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Trace elemental analysis technologies using atmospheric plasma sources have been used in many fields such as environmental analysis, semiconductor industry and medicine. Since 1970's, argon inductively coupled thermal plasma (ICP) has been used as ionization or excitation source for atomic emission spectrometry or mass spectrometry because of the excellent power of detection and the ability to measure isotope ratios. However, it is difficult to determine high ionization potential elements such as halogens and rare gases by using argon plasma. In order to overcome argon ICP, many types of atmospheric plasma sources have been developed and investigated. Furthermore, some kinds of sample introduction systems have been developed and applied with the plasma sources. As a result, sub-pg/mL of detection limits for almost all elements are realized.

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