Recent Trends of Traditional Optical Emission Spectroscopic Measurement of Non-Equilibrium Plasmas  -Atmospheric-Pressure Ar Plasma and Low-Pressure N2 Plasma-

Akatsuka Hiroshi

doi:10.1541/ieejfms.131.6

Recent Trends of Traditional Optical Emission Spectroscopic Measurement of Non-Equilibrium Plasmas -Atmospheric-Pressure Ar Plasma and Low-Pressure N2 Plasma-

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Akatsuka Hiroshi

Research Lab. for Nucl. Reactors, Tokyo Institute of Technology

Bibliographic Information

Other Title

旧くて新しい非平衡プラズマ分光計測の新展開　　―大気圧アルゴンプラズマと減圧窒素プラズマ―
フルクテアタラシイヒヘイコウプラズマブンコウケイソクノシンテンカイタイキアツアルゴンプラズマトゲンアツチッソプラズマ
—Atmospheric-Pressure Ar Plasma and Low-Pressure N<sub>2</sub> Plasma—
—大気圧アルゴンプラズマと減圧窒素プラズマ—

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Abstract

Recent trends of optical emission spectroscopic measurement of atmospheric pressure plasmas are reviewed for the determination of electron temperature and density. Some methods to estimate the electron temperature and density are reviewed, based upon the quantitative description of the excitation kinetics in the non-equilibrium plasmas. Line intensity measurement methods are reviewed for atmospheric-pressure Ar plasma and low-pressure N₂ plasma.

Journal

IEEJ Transactions on Fundamentals and Materials

IEEJ Transactions on Fundamentals and Materials 131 (1), 6-10, 2011

The Institute of Electrical Engineers of Japan

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