Analysis of the Electron Swarm Parameters in the positive column of Ar glow discharges by using the Boltzmann Equation

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  • ボルツマン方程式を用いたアルゴングロー放電陽光柱の電子スオームパラメータの解析
  • ボルツマン ホウテイシキ オ モチイタ アルゴングロー ホウデン ヨウコウチュ

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In a previous paper, a positive columu in Ar glow discharge was analysed by a diffusion equation method and the result showed that cumulative ionization was the most dominant ionization process. Electron swarm parameters used in the analysis, however, were deduced from a Boltzmann equation method neglecting the cumulative ionization.<br>In the present paper, the electron energy distribution function and electron swarm parameters are calculated by the Boltzmann equation method considering the cumulative ionization. The number density of metastable atoms used in the calculation are deduced from the result of diffusion equation.<br>It is found that the calculated distribution function and electron swarm parameters by the present calcula-tion differ from those by the previous one at low electric field and high number density of metastable atoms. This suggests that, for the accurate analysis of a positive column in Ar glow discharge, the Boltzmann cquation method fully considered the cumulative ionization is important.

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