スピニングローター真空計の総合オフセット圧力の解析

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  • An analysis on total offset pressure of Spinning Rotor Gauge.
  • スピニングローター シンクウケイ ノ ソウゴウ オフセット アツリョク ノ カ

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This paper describes to analyze on total offset pressure from which caused to eddy current and thermal expansion in a spinning rotor. Although, these offset pressure damp to spinning to caused from vertical magnetic field and from self thermal expansion, mainly estimated to totally amount of eddy current's effect which was decided by distribution of all part of the magnetic flux density of a spinning rotor. Then, it was calculated to distribution of magnetic flux density in a rotor by a finite element method which used to an application software. lt was result in constant amount and pararell to vertical magnetic field. Then, eddy current of the rotor will estimated to zero that caused to same amount and to collect from all directions with symmetrically. lt is important that to keep the high accuracy within zero-total offset pressure as constructed from symmetrical spinning condition and to protect incline the vertical spinning axis.

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