書誌事項
- タイトル別名
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- Estimation Method for the Space Potential from the Distorted Langmuir Probe Characteristic
- ヒズミ ノ アル Langmuir タンシン トクセイ カラ ノ クウカン デ
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説明
We have measured the electron energy distributions in He DC glow discharge under the condition of 0.5-2.5 Torr, 5-35mA, using Langmuir probe by the second harmonic method.<br>Distortion of the second derivative characteristic can't be neglected, because our probe is designed a large size for the measurement of the high energy part of the electron energy distribution. Therefore minimum, zero, maximum points of the second derivative exist at different probe potentials, and determination of the space potential is difficult.<br>In this paper, we quantified the probe circuit impedance and the ion current, and corrected the second derivative. We simulated the distortion of the second derivative due to a finite probe length and the fluctuation of the space potential. As a result, we confirmed that the inclination and the unevenness of the second derivative (which determine the shape of the electron energy distribution) appear in a high probe bias part from the maximum point of the second derivative characteristic. We found that a reference point of Druyvesteyn's principle exists at the maximum point for a distorted second derivative, and that the space potential lies at the zero point for a nondistorted characteristic.
収録刊行物
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- 電気学会論文誌. A
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電気学会論文誌. A 111 (2), 80-88, 1991
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679577213952
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- NII論文ID
- 130006840008
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- NII書誌ID
- AN10136312
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- ISSN
- 13475533
- 03854205
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- NDL書誌ID
- 3703747
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- データソース種別
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- JaLC
- NDL
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