Three Dimensional Laser Micro Processing with Rotating Beam in Water

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  • 微小三次元形状を創成するための回転レーザビームを用いた水中プロセス
  • ビショウ 3ジゲン ケイジョウ オ ソウセイスル タメ ノ カイテン レーザ

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This paper deals with the three dimensional laser micro processing in water using rotating beam. This Process was experimentally investigated by irradiation of Q-switched Nd: YAG laser for silicon nitride ceramics. Rotating laser beam with an optional radius made the processed groove wide and flat at the bottom, so that continuous plane was easily processed even under the condition of large feed pitch. The depth of processed groove was precisely controlled by the setting of duty factor of rectangular pulse gate for external Q-switching control. No vaporized substance stuck to the processed groove and plane by the effect of removal in water flow and smooth processed surface less than roughness of 40um Ry was obtained in optimum conditions. Three dimensional microshapes for example quadrangular Pyramids, have been easily processed with high accuracy and efficiency.

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