高エネルギー光励起によるPZT (Pb(Zr<sub>x</sub>, Ti<sub>1-x</sub>)O<sub>3</sub>)の表面改質

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タイトル別名
  • High energy photon stimulated surface modification of PZT (Pb(Zr<sub>x</sub>, Ti<sub>1-x</sub>)O<sub>3</sub>)
  • 高エネルギー光励起によるPZT(Pb(Zrx,Ti1-x)O3)の表面改質
  • コウエネルギー ヒカリ レイキ ニヨル PZT Pb Zrx Ti1-x O3

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In order to investigate the potential of applying the synchrotron radiation (SR) process to the micromachine field, the irradiation effcts on a piezoelectric ceramics PZT [Pb(Zrx, Ti1-x)O3] were studied. The desorption of O, Ti, Zr atoms from PZT was observed, and the irradiated surface of the sample became lead-rich. These selective desorptions result in a modification of the ceramics surface into a metallic one. In fact ohmic conductivity was observed on the irradiated surface, whereas no conductivity was obtained on the unirradiated surface. The results obtained in this study are quite interesting from both aspects of desorption mechanism study and application to electrodes formation on piezoelectric devices.

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