Machining of Ceramics using Excimer Laser Radiation

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  • エキシマレーザによるセラミックスの加工
  • エキシマ レーザ ニヨル セラミックス ノ カコウ

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The material processing by the excimer laser ablation is useful for the reasons of its high peak power, large absorption coefficient and small thermal effect. The laser processing of the polymer material is popular in the drilling of ink jet nozzles and the wire stripping. The ceramic materials are trying to process by the excimer laser ablation. Various ceramics were processed under the different values of energy density in our experiment. In ceramics processing, there exist some problems to be solved such as the debris, micro-cracks and ridges. To solve these problems are important for industrial use of the laser ablation. The authors found the processing in vacuum was suitable to avoid debris and micro-cracks. The debris could be easily removed from the surface by a weak laser radiation after the processing. Ridges disappeared when high energy density laser beam was irradiated and the ablated ceramics formed very smooth surface. Database systems about the laser parameters and the processing parameters including visual data were discussed.

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