大容量SiCツェナーダイオードの作製と電気特性評価

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タイトル別名
  • Fabrication and Electrical Properties of High-Power SiC Zener Diodes
  • ダイ ヨウリョウ SiC ツェナーダイオード ノ サクセイ ト デンキ トクセイ ヒョウカ

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This paper reports on the achievement of high-power 4H-SiC Zener diodes which have a high-doped pn junction with a large active area of 4 mm×4 mm. The temperature coefficient of the breakdown voltage is as small as 5.7×10-5 1/K (positive) in the temperature range 20-300°C. The Zener voltage of the fabricated Zener diodes decreased from 41 to 17 V with an increase in the doping concentration. In addition, power capabilities during rectangular pulsed power (tw = 1 ms) are 6.3 kW (40 kW/cm2) at 20°C and 6.0 kW (38 kW/cm2) at 300°C. The repeatable current test for 1 hour with triangular pulse, which corresponds to the surge current under the inverter operation, has been achieved without device failure.

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