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- Ishikawa Hiroyasu
- Nagoya Institute of Technology
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- Egawa Takashi
- Nagoya Institute of Technology
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- Jimbo Takashi
- Nagoya Institute of Technology
Bibliographic Information
- Other Title
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- AlGaN/GaNヘテロ構造の諸特性と高電子移動度トランジスター
Abstract
Properties of metalorganic-chemical-vapor-deposition-grown AlGaN/GaN hetero-structures on sapphire substrates were studied by the Hall effect and atomic force microscopy. The effects of the Al composition and roughness of the surface on the two dimensional electron gas (2DEG) mobility were investigated. 2DEG mobility of undoped-Al0.11Ga0.89N/GaN heterostructure on sapphire was 1100 and 9260cm2/V-s at 300K and 4.6K, respectively. We also fabricated recessed gate and non-recessed gate AlGaN/GaN high electron mobility transistors (HEMT). The recessed and non-recessed gate devices showed the maximum transconductance 146 and 93mS/mm, and drain-source current 900 and 720mA/mm, respectively. The recessed gate AlGaN/GaN HEMT exhibited the very weak temperature dependence of the threshold voltage. Our results demonstrate significant performance improvement for AlGaN/GaN HEMT by using recessed-gate.
Journal
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- IEEJ Transactions on Electronics, Information and Systems
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IEEJ Transactions on Electronics, Information and Systems 122 (6), 910-915, 2002
The Institute of Electrical Engineers of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679586634112
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- NII Article ID
- 130006845177
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- ISSN
- 13488155
- 03854221
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- Data Source
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- JaLC
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed