Study of a Micro-miniature JT Cooler
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- NISHIO Shigehumi
- Institute of Industrial Science, University of Tokyo
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- IWAKAMI Takeshi
- Graduate School of Engineering, University of Tokyo
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- SHIRAKASHI Ryo
- Institute of Industrial Science, University of Tokyo
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- MITA Makoto
- Institute of Industrial Science, University of Tokyo
Bibliographic Information
- Other Title
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- マイクロ・ミニチュアJTクーラーに関する研究
- マイクロ ミニチュア JT クーラー ニ カンスル ケンキュウ
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Abstract
The micro-miniature JT cooler is a promising cooling device as an element of the micro-thermal system for semiconductor devices, which dissipate an incredible amount of heat. In particular, the thermal management of laser diodes is a serious problem because they require a large amount of power but must maintain a fixed temperature. Considering such a situation, the performance of a micro-miniature JT cooler was calculated under the assumption of a countercurrent heat exchanger operating with a laminar gas flow, and the guidelines of a micro-miniature JT cooler for optimizing pump power and size were designed from the viewpoint of minimizing the cost. The authors present the results in this paper. A micro-miniature JT cooler was fabricated from Si wafer using a photolithographic process, which is available for operation with C2H6 from 3 MPa to 0.1 MPa. It is shown that a cooling power of 2.1 W was obtained at 239 K with a mass flow of 51.7 mg/s.
Journal
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- TEION KOGAKU (Journal of Cryogenics and Superconductivity Society of Japan)
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TEION KOGAKU (Journal of Cryogenics and Superconductivity Society of Japan) 38 (12), 680-685, 2003
CRYOGENICS AND SUPERCONDUCTIVITY SOCIETY OF JAPAN
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Details 詳細情報について
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- CRID
- 1390282679591982336
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- NII Article ID
- 10012477677
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- NII Book ID
- AN00333419
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- COI
- 1:CAS:528:DC%2BD2cXhtVSjsbk%3D
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- ISSN
- 18800408
- 03892441
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- NDL BIB ID
- 6814608
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed