A Compact Excimer Lamp Constructed by Piezoelectric Transformer

DOI NDLデジタルコレクション Web Site 被引用文献5件 参考文献28件
  • TERANISHI Kenji
    Research Fellow of the Japan Society for the Promotion of Science (Chiba Institute of Technology)
  • ITOH Haruo
    Graduate School of Engineering, Chiba Institute of Technology

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A compact excimer lamp constructed with a piezoelectric transformer (PT) has been developed in our laboratory. This excimer lamp is designed based on the excitation of a dielectric barrier discharge (DBD) in a He-Xe mixture generated by the PT, which is driven with low applied voltages of several tens of volts (15-45V). Vacuum ultraviolet (VUV) radiated from the lamp is detected by a phototube having a spectral response region ranging from 160 to 320 nm in conjunction with an optical filter to discriminate the VUV and UV regions. The VUV radiation in the wavelength range 160-200 nm is recognized in this experiment. This may be derived from the 172-nm light emission by the transitions of the Xe2 excimers to the ground state. Investigations into the radiated VUV intensity are carried out by varying the gas pressure and the gap length. The optimal condition for the present excimer lamp is determined.

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