In situ Measurement Technologies in Semiconductor Manufacturing.

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  • 半導体製造工程におけるｉｎ　ｓｉｔｕ計測技術

Abstract

In situ measurements in semiconductor manufacturing with lasers are advantageous in that they cause very little disturbance to objects and allow real-time accurate quantification. This paper reviews three in situ measuring methods for gas concentration, particle identification, and wafer temperature based on IR absorption, laser induced breakdown (LIB) and laser ultrasound generation in solids, respectively.

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