Soft X-Ray Optics. Development of Multilayer Supermirror.

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  • 軟Ｘ線オプティックス　スーパーミラーの最前線
  • スーパーミラー ノ サイゼンセン

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Abstract

The recent progress of multilayers makes it possible to construct variety of optical systems used in the wavelength region 30-0.01nm. Especially a depth-graded multilayer, so called supermirror, has a great advantage to get high reflectivity in the wide energy band for hard x-rays. The design, fabrication and characterization of supermirror are going on to apply for synchrotron radiation beamline optics, x-ray telescope and x-ray microscope. At present reflectivity of Pt/C supermirror is obtained to be 20-30% in 27-40keV region at the incidence angle of 0.3deg..

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