ポリイミドのＫｒＦレーザーアブレーションによる表面形状変化

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書誌事項

タイトル別名
  • Surface Morphological Changes Produced by KrF Laser Ablation in Polyimides.

説明

We investigate morphological changes produced by KrF excimer laser irradiation on polyimide surfaces, using different total fluences. Lower than 20 shots, very little roughness was introduced. With increasing shot numbers, however, surface structures were devided in two cases. Firstly, fibrous surface structure has been foned in crystallized polyimide. In second, spherical granular morphology has been foned in amorphous polyimide. The granular-size increasing with shot numbers should be explained by aggregation of laser-produced low molecular weight materials.

収録刊行物

  • レーザー研究

    レーザー研究 25 (2), 176-178, 1997

    一般社団法人 レーザー学会

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