Suppression of Galvanometric Mirror Vibrations by Self-Sensing Actuation Using Piezoelectric Element

DOI Web Site Web Site BIBCODE 3 Citations 14 References
  • Seki Kenta
    Department of Computer Science and Engineering, Nagoya Institute of Technology
  • Kannami Hiroki
    Department of Computer Science and Engineering, Nagoya Institute of Technology
  • Iwasaki Makoto
    Department of Computer Science and Engineering, Nagoya Institute of Technology
  • Hirai Hiromu
    Department of Computer Science and Engineering, Nagoya Institute of Technology

Bibliographic Information

Other Title
  • 圧電素子を用いたセルフセンシングアクチュエーションによるガルバノミラーの制振制御
  • アツデン ソシ オ モチイタ セルフセンシングアクチュエーション ニ ヨル ガルバノミラー ノ セイシン セイギョ

Search this article

Abstract

This paper presents a method for suppressing the vibration of galvanometric mirrors used in laser positioning systems. In such systems, it is important to carry out fast and high-precision positioning of the mirror and maintain the flatness of the mirror after positioning, so that the required control specifications are achieved. However, resonant vibrations of the mirror, which are excited by the moment force during positioning, lead to residual vibrations after positioning, thereby, deteriorating the flatness of the mirror and laser manufacturing accuracy. Therefore, we attempt to suppress such vibrations by mounting a piezoelectric element on the mirror, so that the functions of the actuator and sensor of the piezoelectric element are made use of when designing the vibration suppression controller. The applicability of the proposed method to industrial galvano scanners has been verified by performing experiments using a positioning device.

Journal

Citations (3)*help

See more

References(14)*help

See more

Keywords

Details 詳細情報について

Report a problem

Back to top