An Automated Basic Gases Monitor Coupled with a Parallel-plate Wet Denuder for Monitoring of Ammonia and Amines in Clean Rooms

DOI IR Web Site Web Site Open Access

Bibliographic Information

Other Title
  • クリーンルーム雰囲気中のアンモニア及びアミンガスを監視するウエットデニューダ方式の自動モニタ
  • クリーンルーム フンイキ チュウ ノ アンモニア オヨビ アミンガス オ カンシ スル ウエットデニューダ ホウシキ ノ ジドウ モニタ

Search this article

Description

This paper describes the automated basic gases measuring technology for the near-real-time monitoring of ammonia (NH3) and amines in a clean room. The analytes collected with a parallel-plate wet denuder (PPWD) are continuously pumped into one of two cation concentration columns for 15 min, and determined on-line by means of ion chromatography. While one concentration column is used for chromatographic separation, the other is used for loading the sample solution. The PPWD collects quantitatively mono ethanolamine (MEA) gas at a sampling flow rate of 2.5 L min−1. The response time to any variability in the MEA gas concentration is fast enough for near-real-time monitoring. The limits of detection are 0.005 μg m−3 for NH3 gas, 0.01 μg m−3 for MEA gas, and 0.02 μg m−3 for N-methylethanolamine (N-MEA) gas. The NH3 and N-MEA gas concentrations have been successfully measured at semiconductor manufacturing clean rooms.

Journal

  • BUNSEKI KAGAKU

    BUNSEKI KAGAKU 66 (7), 503-508, 2017

    The Japan Society for Analytical Chemistry

Keywords

Details 詳細情報について

Report a problem

Back to top