CF4 Decomposition Using Low-Pressure Pulse-Modulated Radio Frequency Plasma

DOI Web Site Web Site 1 Citations 43 References

Search this article

Abstract

CF4 is one of the most stable gases among perfluorocompounds (PFCs) whose decomposition is extremely difficult. In this study, CF4 decomposition was investigated using a pulse-modulated radio frequency (RF) plasma of 2MHz, which is applicable to plasma etching and novel functional material manufacturing processes. When the absolute pressure and 100% CF4 and 99.5% O2 flow rates were set at 80Pa and 0.1 and 0.2NL/min, respectively, almost complete CF4 decomposition was achieved at the pulse modulation frequency range of 25kHz to 99kHz. The analysis of the by-product of CF4 decomposition was carried out using a CO2 gas analyzer and a Fourier transform infrared spectrophotometer (FTIR) with a pulse modulation frequency of 75kHz. It was known that 10%, 50% and 24% of CF4 are converted to CO, CO2 and COF2, respectively. It was considered that the remaining 16% of carbon is converted to carbon particles or other organic substances.

Journal

Citations (1)*help

See more

References(43)*help

See more

Keywords

Details 詳細情報について

Report a problem

Back to top