On-Chip High-Speed Actuation of Magnetically Driven Microtool with Fine V Groove Pattern
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- Hagiwara Masaya
- Nagoya University UCLA
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- Kawahara Tomohiro
- Nagoya University Kyusyu Institute of Technology
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- Iijima Toru
- Muroran Institute Technology
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- Arai Fumihito
- Nagoya University
Bibliographic Information
- Other Title
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- 微細V溝パターンによる磁気駆動マイクロロボットのオンチップ高速駆動
- ビサイ Vミゾ パターン ニ ヨル ジキ クドウ マイクロロボット ノ オンチップ コウソク クドウ
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Abstract
This paper presents the high-speed microrobot driven by permanent magnet in a microfluidic chip. The comprehensive analysis of fluid force, the optimum design and its fabrication was conducted to reduce the fluid force on the magnetically driven microrobot by developing fine V groove pattern on the microrobot. Riblet surface, which is regularly arrayed V grooves, were employed to reduce fluid friction on the microrobot. The upward force is generated by the wedge effect and it generates lubricant film thickness between the microrobot and the glass substrates. Optimization process was conducted to design riblet surface on the microrobot in order to maximize lubricant film thickness. The Ni and Si composite fabrication was employed to form the optimum riblet shape by anisotropic Silicon (Si) wet etching and deep reactive ion etching. The evaluation experiments show the microrobot can be actuated up to 90 Hz, which is about 10 times higher than the original microrobot.
Journal
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- Journal of the Robotics Society of Japan
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Journal of the Robotics Society of Japan 30 (7), 727-734, 2012
The Robotics Society of Japan
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Details 詳細情報について
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- CRID
- 1390282679704979328
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- NII Article ID
- 10031028484
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- NII Book ID
- AN00141189
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- ISSN
- 18847145
- 02891824
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- HANDLE
- 10258/00008868
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- NDL BIB ID
- 023970024
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- Text Lang
- ja
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- Data Source
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- JaLC
- IRDB
- NDL
- Crossref
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed