高精度な直線運動に関する研究

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書誌事項

タイトル別名
  • Development of a High Precision Straight Motion System
  • コウ セイド ナ チョクセン ウンドウ ニ カンスル ケンキュウ

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抄録

In the system, a steel block is completely floated by some air pads. The block and pads are mounted on a conventional mechanical sliding table. When the table is driven straightly, the vertical and horizontal positions, and the pitch, roll and yaw angles of the table and block change because the mechanical sliding table is not perfectly correct. These changes against a standard are detected by some optical and electronic devices and then the positions and angles are controlled by changing the supply pressure to the air pads. In this report, a straight edge is used as a provisional standard of the vertical straightness and an autocollimator is used to detect the change in the block pitch angle. The working length of the system is 1 m and the vertical position error of the block against the straight edge is less than 0.1μm and the change in pitch angle less than 0.2 second of arc.

収録刊行物

  • 精密機械

    精密機械 50 (6), 986-991, 1984

    公益社団法人 精密工学会

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