１μｍ以下における触針式表面粗さ測定器の縦倍率の校正

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タイトル別名
  • Calibration of the vertical magnifications of a surface roughness measuring instrument with stylus.
  • 1 マイクロm イカ ニ オケル ショクシンシキ ヒョウメン アラサ ソクテイ

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抄録

There are many cases to measure and evaluate small surface roughness less than 1 μm. In this study it is described that small step heights are strictly measured and evaluated by a light-wave interferometer. From the photographs of interference fringes the small step heights are evaluated by the techniques of the method of least squares and the analysis of variance. The evaluated step heights are 0.08 μm, 0.23 μm, 0.51 μm and 1.05 μm. These are available as reference specimens to calibrate the vertical magnifications of four kinds of surface roughness measuring instruments with stylus. According to the calibrated result, it is confirmd that the exact calibration of the vertical magnifications is necessary for the measurement of small surface roughness less than 1 μm.

収録刊行物

  • 精密機械

    精密機械 51 (10), 1905-1908, 1985

    公益社団法人 精密工学会

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