Straightness measurement using heterodyne moire method.

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  • ヘテロダイン応用モアレ法による真直度の測定
  • ヘテロダイン オウヨウ モアレホウ ニ ヨル シンチョクド ノ ソクテイ

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Heterodyne moiré method is applied to the displacement measurement of the interference fringes, which act as the normal lines in the straightness measurement. As the phase difference of the moiré fringes is detected that are transformed into time frequency by the tranferring reference grating with a constant speed, the measurement is done with short time and high accuracy, and also continuously. Further, it is confirmed that the flutter of the laser beam can be controlled by sending the air flow to the beam.

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