Development of Scanning Near-field Optical Microscope Using a Spherical Small Protrusion as a Probe.
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- KATAOKA Toshihiko
- 正会員 大阪大学工学部
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- ENDO Katsuyoshi
- 正会員 大阪大学工学部
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- INOUE Haruyuki
- 正会員 大阪大学工学部
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- INAGAKI Kohji
- 正会員 (株)UHA味覚糖精密工学研究所
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- MORI Yuzo
- 正会員 大阪大学工学部
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- HIROSE Kikuji
- 正会員 大阪国際女子大学
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- TAKADA Kazumasa
- 大阪大学大学院
Bibliographic Information
- Other Title
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- 球状微小突起をプローブとした走査型近接場光学顕微鏡の開発
- キュウジョウ ビショウ トッキ オ プローブ ト シタ ソウサガタ キンセツバ
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Abstract
The probe of this scanning near-field optical microscope (SNOM) is a dielectric sphere of 500 nm in diameter on a transparent substrate. The probe sphere is illuminated by evanescent wave which is formed by the incidence of He-Ne laser with the wave length of 632.8 nm from the inside of the substrate on the condition of total reflection. The light from the probe is collected by a conventional microscope through the substrate. The detected light intensity changes remarkably when a sample is brought in a near-field around the probe. The variation of detected light intensity in the near-field depends on refractive index of sample; the smaller real part of refractive index of sample, the more remarkable increase of detected light intensity. This result is explained by using an electric dipole model for the electromagnetic interaction between probe and sample. The vertical resolution of about 1 nm and lateral resolution of less than 20 nm are obtained for the developed microscope by measuring a standard specimen which is prepared by vacuum evaporation of metal.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 60 (8), 1122-1126, 1994
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390282679740484736
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- NII Article ID
- 110001371649
- 10003090520
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 3888650
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed