Fabrication of Micro Structures using Thin Film Metallic Glass. Proposal and Fabrication of a Micro Electrostatic Actuator of Thin Film Metallic Glass.
-
- HATA Seiichi
- 東京工業大学精密工学研究所
-
- GOTO Jun
- 東京工業大学大学院
-
- SATO Kaiji
- 東京工業大学精密工学研究所
-
- SHIMOKOHBE Akira
- 東京工業大学精密工学研究所
Bibliographic Information
- Other Title
-
- 薄膜金属ガラスを用いた微細構造物の製作 2 薄膜金属ガラス静電マイクロアクチュエータの提案と試作
- ハクマク キンゾク ガラス オ モチイタ ビサイ コウゾウブツ ノ セイサク(ダイ2ホウ)ハクマク キンゾク ガラス セイデンマイクロアクチュエータ ノ テイアン ト シサク
- Proposal and Fabrication of a Micro Electrostatic Actuator of Thin Film Metallic Glass
- 薄膜金属ガラス静電マイクロアクチュエータの提案と試作
Search this article
Abstract
This paper presents a new type of electrostatic actuator (Conical Spring Linear Actuator : CSLA) capable of vertical stepwise motion to a substrate. The CSLA is made of a thin film metallic glass (TFMG) of a conical spring shape. The TFMG is expected to be a material suitable for micro structures because it is an amorphous alloy which free from anisotropy and defects originating from the crystal structure. Micro machining of TFMG is possible by a lift-off technique. Moreover TFMG softens at a certain temperature range called the supercooled liquid state, which allows surface micro-machined TFMG structures to be easily formed into three-dimensional shapes. This micro forming technique allows the conical spring shape of the CSLA. The conical spring acting as a moving electrode was assembled on a fixed four-section electrode on the substrate so that the actuator could make a stepwise motion. The CSLA showed vertical stepwise motion of four stages to the substrate by switching the electrodes, which were applied in rotation at a constant voltage (17V). The total displacement of the CSLA was limited to 30μm due to the unexpected deformation of the conical spring.
Journal
-
- Journal of the Japan Society for Precision Engineering
-
Journal of the Japan Society for Precision Engineering 66 (2), 287-291, 2000
The Japan Society for Precision Engineering
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390282679741650176
-
- NII Article ID
- 10006916015
- 110001372882
-
- NII Book ID
- AN1003250X
-
- ISSN
- 1882675X
- 09120289
-
- NDL BIB ID
- 4985900
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- Abstract License Flag
- Disallowed