Reduction of Vibration for Main Functional Part in Precision Device Based on Sensitivity Analysis with Respect to Relative Motion.
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- TOI Takeshi
- 正会員 中央大学理工学部
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- MURASE Yoshinori
- 学生会員 中央大学大学院
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- OKUBO Nobuyuki
- 正会員 中央大学理工学部
Bibliographic Information
- Other Title
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- 相対振幅感度を利用した精密機器の主機能部の低振動化
- ソウタイ シンプク カンド オ リヨウシタ セイミツ キキ ノ シュキノウブ
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Abstract
The purpose of this research is the reduction of relative motion between two locations of main functional part of precision device under various conditions. First, sensitivity analysis is described which takes only one location, relative motion or objective frequency band into consideration in conventional method. Next, new sensitivity analysis is proposed to consider not only objective frequency band but also relative motion. The new method is applied for a simple numerical model and experimental model, and structural modification is carried out for the reduction of relative motion to compare of conventional methods. Moreover, relative motion between objective lens and stage that are main functional part in microscope for inspection of large scale integration circuit is analyzed by new sensitivity method for reducing relative motion in low frequency band. The image deflection can be reduced by structural modification and evaluated using two dimensional position sensor quantitatively.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 63 (1), 55-59, 1997
The Japan Society for Precision Engineering
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Details 詳細情報について
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- CRID
- 1390282679741704576
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- NII Article ID
- 110001372093
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 4105617
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed