Measurement of ultra-fine random surface roughness based on fraunhofer diffraction.

DOI Web Site 2 Citations

Bibliographic Information

Other Title
  • Ｆｒａｕｎｈｏｆｅｒ回折による超精密加工面粗さの測定評価に関する研究
  • Fraunhofer カイセツ ニ ヨル チョウ セイミツ カコウメン アラサ

Search this article

Abstract

A new method based on the Fraunhofer diffraction theory which can estimate RMS roughness of super smooth random surface such as the polished or lapped surface is presented in this paper. The relations between the random surface roughness and the Fraunhofer diffraction pattern are analized theoretically and an equation which can estimate quantitatively the RMS roughness is derived. In order to verify the validity of this proposed method, computer simula-tions as well as experiments for the silicon wafer with a surface roughness of 1-10 nm Rrms are carried out. In addition, STM is used for checking the surface roughnesses of the workpieces. Consequently, it is found that this method makes it possible to measure the surface roughness within a 10% error from 1 nm to maximum 120 nm Rrms. Moreover, from experiments using an improved measuring system which can evaluate the texture all over the surface of a silicon wafer, this method is found to be useful for measuring quickly and easily the ultra fine surface roughness of the complete surface even if workpiece is set with a tilt and vibrates when the table is moving.

Journal

Citations (2)*help

See more

Keywords

Details 詳細情報について

Report a problem

Back to top