Development of a Nondeforming Freezing Pin Chuck (2nd Report)
Bibliographic Information
- Other Title
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- 無変形冷凍ピンチャックの開発 (第2報)
- 無変形冷凍ピンチャックの開発(第2報)ピン上への冷凍液塗布法と塗布特性
- ムヘンケイ レイトウ ピンチャック ノ カイハツ ダイ2ホウ ピン ジョウ エ ノ レイトウエキ トフホウ ト トフ トクセイ
- —Application Method and Characteristics of Freezing Liquid on Pins—
- —ピン上への冷凍液塗布法と塗布特性—
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Abstract
Large quartz masks require a flatness tolerance of 10 μm to transfer fine patterns; however, these masks typically have a warp range of 10 to 100 μm. Fabricating a nonwarped mask is difficult because, during the polishing process, the mask substrate cannot be held without deformation. Therefore, a nondeforming freezing pin chuck has been developed. This paper describes a new application method and the resulting characteristics of the freezing liquid droplets. An oil-repellent coating and a newly developed low-speed spraying method were used to make a spherical droplet on a pin. The evaporation times of freezing liquid and water droplets on a 0.5-mm-diameter pin are the same (about 200 sec) despite the difference in volume, because the water droplet has a significantly larger surface area. After the oil-repellent coating was applied, the contact angle of the freezing liquid droplet increased from about 40° to about 120°, and the height increased from 65 to over 300 μm; likewise, the contact angle of the water droplet increased from about 130° to about 160°, and the height increased from 400 to over 1000 μm. When combined with the oil-repellent coating, the new low-speed spraying method yielded a freezing liquid droplet with a height of over 200 μm on a 0.5-mm-diameter pin — more than three times the height generated before the oil-repellent coating was applied.
Journal
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- Journal of the Japan Society for Precision Engineering
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Journal of the Japan Society for Precision Engineering 77 (10), 972-976, 2011
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390282679772683520
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- NII Article ID
- 130002121204
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- NII Book ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL BIB ID
- 11269828
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed