フェライト材のメカノケミカルポリシング　Ｉ　　加工液，定盤材質及び加工機構について

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タイトル別名
  • Mechano-chemical polishing of ferrite. (1st report). The effects of polishing fluid and material of polishing plates.
  • フェライトザイ ノ メカノケミカルポリシング 1 カコウエキ ジョウバン ザイ
  • The Effects of Polishing Fluid and Material of Polishing Plates
  • 加工液,定盤材質及び加工機構について

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抄録

This paper presents some experimental results on mechano-chemical polishing of ferrite, and suggestion on the mechanism of mechano-chemical polishing. Such elastic polishing plates as synthetic leather is popularly used with an alkaline polishing fluid in the mechano-chemical polishing of semiconductive materials. In this paper, however, polishing plates made by either tin or lead are used with chemically active polishing fluid to ferrite. Electro-chemical action is added to mechanical polishing for the sake of composing the local cell between a polishing plate and a workpiece. Electro-chemical action not only increases stock removal rate twice or more, but also reduces the surface damaged layer of workpieces a quarter or less in comparison with those in mechanical polishing process.

収録刊行物

  • 精密工学会誌

    精密工学会誌 54 (3), 574-579, 1988

    公益社団法人 精密工学会

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