Development of a High Precision Mounting Robot System With Fine Motion Mechanism (3rd Report)

DOI Web Site 被引用文献8件 参考文献6件
  • OMARI Abdelhafid
    Department of Mechanical Eng. & Intelligent Systems, The University of Electro-Communications
  • MING Aiguo
    Department of Mechanical Eng. & Intelligent Systems, The University of Electro-Communications
  • LIMAM Ghaylen
    Department of Mechanical Eng. & Intelligent Systems, The University of Electro-Communications
  • KANAMORI Chisato
    Department of Mechanical Eng. & Intelligent Systems, The University of Electro-Communications
  • KAJITANI Makoto
    Department of Mechanical Eng. & Intelligent Systems, The University of Electro-Communications
  • Nakamura Shuji
    Japan Radio Company

書誌事項

タイトル別名
  • Development of a High Precision Mounting Robot System With Fine Motion Mechanism(3rd Report). Positioning Experiments of SCARA Robot with Fine Mechanism.
  • Development of a high-precision mounting robot with fine motion mechanism (3rd report)—Positioning experiment of scara robot with fine mechanism
  • Positioning Experiments of SCARA Robot with Fine Mechanism

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説明

In our previous work, robust control structure based on disturbance observer for a fast and precise fine motion mechanism has been proposed. The functionality of the controller was verified using one axis of precise X-Y table combined with-one axis fine motion mechanism. As a further step in this paper, the approach is extended to two-axes fine motion mechanism with a SCARA robot as a real system to realize the final purpose, that is, the development of high-precision mounting robot. First, the paper introduces a high performance robot system based on a SCARA robot coupled with a fine motion mechanism which was developed in our laboratory. Second, the paper presents a control scheme that enables correction of possible offsets of the end-effector relative to the target and compensation of the oscillations at the end-point. Finally, experimental results show significant improvements in end-point accuracy and settling time achieved by the novel configuration of the coarse/fine robotic system. As a result, a repeatability (3σ) less than 2 μm and the CP positioning error (3σ) less than 4.0 μm were achieved by the coarse/fine robotic system.

収録刊行物

  • 精密工学会誌

    精密工学会誌 67 (7), 1101-1107, 2001

    公益社団法人 精密工学会

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