Ultraprecision Microgrooving of Hard Materials by Diamond Tool with Special Chamfer to Realize Tool Wear Suppression

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  • 特殊チャンファ付きダイヤモンド工具の摩耗抑制をした高硬度材の超精密マイクロ溝加工
  • トクシュ チャンファ ツキ ダイヤモンド コウグ ノ マモウ ヨクセイ オ シタ コウコウドザイ ノ チョウセイミツ マイクロ ミゾカコウ

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Recently, in accordance with the technical development and miniaturization of the information equipments, the demand of optic elements with high precision and miniaturization is increased. The die is used in the manufacture of the optic elements. Thus, it is needed to machine the die with high efficiency and high precision. As the material of mold, hard material including cemented carbide and ceramics is used. However, when hard material is machined, it is a problem of the occurrence of brittle fracture and hard tool wear. Tools with chamfer are used in the machining of hard material to reduce tool wear. However, there is a serious problem that the rake angle is not constant along the edge of the conventional R-shape tool with chamfer since the tool shape is like ellipse, it is difficult to machine hard materials with high precision. To solve this problem, a special tool with chamfer is developed. The study proposes a new microgrooving method with tool wear suppressed by the special tool with chamfer. The effectiveness is verified by the microgrooving experiment of SiC.

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