書誌事項
- タイトル別名
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- Development of Silicon Microprobe with Multilayer Circuitry for Multi-site Neural Recording using Anisotropic Etching.
- イホウセイ エッチング オ モチイタ セイタイ デンイ ケイソク ノ タメ ノ タソウ コウゾウガタ マイクロプローブ ノ カイハツ
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This paper focuses on a development of a cortical signal recording system to analyze an information processing system in a brain, and describes a fabricated microprobe using techniques of the microfabrication for realizing a multi-site recording. In order to identify the brain system, the multi-site and simultaneous recording is required. However, the property of the invasiveness leads to miniaturizing such a device. Therefore, the multi-site microprobe was fabricated by applying a multilayer structure of electrical circuits. Moreover, the anisotropic etching was applied in order to simplify the fabrication process. And the electrical property of this microprobe was described.
収録刊行物
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- 精密工学会誌
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精密工学会誌 68 (9), 1185-1189, 2002
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282679773395584
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- NII論文ID
- 110001373822
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 6290325
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
