静圧作動油に起因する超精密工作機械の熱変形抑制

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タイトル別名
  • Minimizing Thermal Deformation of Ultraprecision Machine Tool Induced by Lubricating Oil of Hydrostatic Bearings
  • セイアツ サドウユ ニ キイン スル チョウセイミツ コウサク キカイ ノ ネツ ヘンケイ ヨクセイ

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抄録

This study deals with two types of thermal deformation of ultraprecision machine tool equipped with oil-lubricated hydrostatic bearings; one is caused by temperature fluctuation in the supply lubricating oil and the other which have not yet been investigated is caused by hydrostatic pressure fluctuation. First, it was experimentally found that such thermal deformation. Second, as a method to minimize such thermal deformation, the highprecision regulator was proposed, which could precisely control the temperature and pressure of the supply lubricating oil, and experimentally evaluated the effectiveness of this method. As the experimental result, this method showed that temperature fluctuation of the ultraprecision machine tool can be restricted to the order of a ten-thousandth of a degree C, and that thermal deformation can be restricted to within several nanometers.

収録刊行物

  • 精密工学会誌

    精密工学会誌 75 (9), 1106-1111, 2009

    公益社団法人 精密工学会

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