超高精度直線運動機構 (第2報)

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書誌事項

タイトル別名
  • An Ultra Precision Straight Motion System (2nd Report)
  • 超高精度直線運動機構-2-5自由度の制御
  • チョウ コウ セイド チョクセン ウンドウ キコウ 2 5 ジユウド ノ セイ
  • 5自由度の制御
  • Five Degrees of Freedom Control of Motion

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抄録

In order to realize straight motion at the highest level of accuracy, the system is introduced in which five degrees of freedom of a moving table vertical and horizontal positions, and pitch, roll and yaw angles are controlled precisely. The table is supported by active air bearings composed of piezo-actuators and air pads. Motion accuracies of the table to the straight edge masters are measured by several capacitance micrometers. Control system with PID-PD controller is designed and motion-positioning resolutions of 0.02 μm and 0.02 arc sec are achieved. Straight motion accuracies were 0.05 μm in vertical and horizontal positions, 0.06 arc sec in pitch, 0.07 arc sec in roll and 0.03 arc sec in yaw angles over 1 000 mm travel at table speed of 10 mm/s.

収録刊行物

  • 精密工学会誌

    精密工学会誌 54 (10), 1945-1950, 1988

    公益社団法人 精密工学会

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