Roughness measurements of supersmooth surface by laser light scattering.

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  • レーザ反射散乱光による超精密切削面の粗さ測定技術
  • レーザ ハンシャ サンランコウ ニ ヨル チョウ セイミツ セッサクメン ノ

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Abstract

A laser light scattering technique was investigated for application to non-contact roughness measurement. Roughness parameters were evaluated from the distribution of scattered light intensity by using the principle of optical Fourier transformation. This technique coincided closely with the stylus method in the range of 0.004-0.02μmRrms (0.02-0.1μmRz). Air blowing eliminates the effects of residual cutting fluid on the surface to be measured. This technique can be easily applied to on-machine measurements due to low vibration disturbance, convenient measuring distance, and simple instrumentation.

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