TiAlN/SiN積層膜の形成とトライボロジー特性

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タイトル別名
  • Deposition and Tribological Properties of TiAlN/SiN Multilayer Coatings
  • TiAlN/SiN セキソウマク ノ ケイセイ ト トライボロジー トクセイ

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The influence of surface morphology of TiAlN/SiN multilayer, TiAlN and SiN monolayer coatings on their friction behaviors was investigated under dry and water boundary lubrication conditions. The TiAlN/SiN multilayer and TiAlN monolayer coatings were prepared on cemented carbide tool and silicon wafer substrates by reactive DC magnetronsputtering deposition. Tribological properties of the coatings were evaluated by high-frequency linear-oscillation friction testing. The morphology and microstructure of the coatings was observed by atomic force microscopy (AFM) in the dynamic friction mode (DFM) and transmission electron microscopy (TEM) for the investigation of the relation between the topography and mechanical properties of the TiAlN/SiN coatings. The grain diameter and roughness of the TiAlN/SiN are smaller than those of the TiAlN. As a result, the TiAlN/SiN shows higher hardness and better wear-resistant propertiescompared with the TiAlN and it shows a frictional coefficient as low as μ=0.38 under the water boundary lubrication. It is considered that the introduction of the SiN layer contributed to the decrease in the grain diameter of TiAlN and the improvement of surface roughness. The grain diameter and surface roughness can be decreased by changing substrate rotation speed.

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  • 精密工学会誌

    精密工学会誌 78 (10), 905-911, 2012

    公益社団法人 精密工学会

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