Precision Surface Finishing of Si3N4 Fine Ceramic Components by the Application of Magnetic Abrasive Machining Process.

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  • 磁気研磨法による窒化けい素ファインセラミックスの精密仕上げ
  • ジキ ケンマホウ ニ ヨル チッカ ケイソ ファイン セラミックス ノ セイミツ シアゲ

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The aim of the paper is to propose a magnetic abrasive finishing process that simultaneously finishes of all the surfaces of fine ceramic step features by the flexibility in the abrasive behavior. In a magnetic field, the magnetic abrasive is suspended by magnetic force along the lines of the magnetic force, making abrasive chains that have flexibility to general shape. Introducing a nonferrous, such as fine ceramic, step feature component into the abrasive chains causes the abrasive to be displaced aside the component. Using the flexibility of the abrasive behavior, the reconfigured chains acts against all the surfaces of the component and finishes all the surfaces of fine ceramic step features simultaneously. This study demonstrates the uniform roughness improvements, 8μmRy to 0.5μmRy, of all the surfaces of a Si3N4, ceramic step roller (20mm outer diameter, 5mm step of 10mm width).

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