書誌事項
- タイトル別名
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- Nanoscale measurement of whole cylinder surface using a laser microscope with a wide field of view
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説明
In a previous study, we developed a new method for observation of the whole cylindrical surface in a very short time,using a laser microscope with a wide field of view. When cylindrical specimens were rotated by a motor-driven rotary table, the focused laser light was scanned along a generatrix of the cylinder surface. Thus, the whole cylinder surface could be observed easily even over a very short time. As the obtained image was a developed view of the cylinder surface, it was easy to measure the distance between any two points on the cylindrical surface. In this study, we acquired interference images of the whole cylinder surface with the aid of a reference plane. As a result, fringe patterns over the whole cylinder surface could be obtained. From image processing of the fringe patterns, we calculated the nanoscale surface profile of the cylinder.
収録刊行物
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- 精密工学会誌
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精密工学会誌 81 (7), 699-704, 2015
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282679805585664
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- NII論文ID
- 130005084687
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- ISSN
- 1882675X
- 09120289
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- 本文言語コード
- ja
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- 資料種別
- journal article
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可
