書誌事項
- タイトル別名
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- Phase-shifting Shadow Moiré Method using Light-source-stepping
- Phase-shifting Shadow Moiré Method using Light-source-stepping
説明
Shadow moiré method is useful to measure height distribution of a flat object with high accuracy because it can use a fine grating by setting the grating near the object. By combining with a phase shifting method, it is quantitatively analyzable with high accuracy. In this study, the authors propose a new phase-shifting shadow moiré method using light-source-stepping method with LED light sources. The phase-shifting can be performed at high speed by changing the electrical on/off switches of the LED light sources because of no use of movable parts. The accuracy is 3μm in a 90mmx90mm area. The theory and experimental results are shown.
収録刊行物
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- 精密工学会誌
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精密工学会誌 82 (2), 157-162, 2016
公益社団法人 精密工学会
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キーワード
詳細情報 詳細情報について
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- CRID
- 1390282679805941248
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- NII論文ID
- 130005124393
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- ISSN
- 1882675X
- 09120289
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
