書誌事項
- タイトル別名
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- Levitation and Deformation Characteristics of Thin Glass Substrate on Non-Contact Aerostatic Conveyer
- クウキ セイアツ ジクウケガタ ガラス キバン ハンソウ ソウチ ニ オケル ハクバン ガラス ノ フジョウ ・ ヘンケイ トクセイ
- Levitation and deformation characteristics of thin glass substrate on non‐contact aerostatic conveyer
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A non-contact aerostatic conveyer was recently proposed to quickly feed and inspect large glass substrates for liquid crystal display. The air conveyer supports the glass substrates by compressed air film and then feeds them through while keeping them clean compared to a conventional roller conveyer. The glass substrate in the latest generation is over 3 m square, and its thickness is less than 0.7 mm. Such thin and large glass substrates are expected to easily deform due to pressure distribution in the air film. Aim of this study is to investigate the levitation and deformation characteristics of glass substrates on a non-contact aerostatic conveyer with inherent orifice restrictors and to establish a calculation method to predict the glass sheet deformation with high accuracy. The deformation behavior of glass sheet on air film was investigated numerically by using the compressible Reynolds equation and Timoshenko's thin plate theory. Numerical results were compared with experimental ones to ascertain the validity of the calculation method. It was found that the glass sheet was easily deformed with a wavy shape by the pressure distribution of the air film. Experimental and numerical results showed almost the same trend.
収録刊行物
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- 精密工学会誌
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精密工学会誌 79 (6), 559-564, 2013
公益社団法人 精密工学会
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詳細情報 詳細情報について
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- CRID
- 1390282679806448896
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- NII論文ID
- 130003384997
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- NII書誌ID
- AN1003250X
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- ISSN
- 1882675X
- 09120289
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- NDL書誌ID
- 024687319
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可